Novel Functional Polymers from N-(Tosyloxy)maleimide....

Chemistry of Materials 1994 / 08 Vol. 6; Iss. 8

Novel Functional Polymers from N-(Tosyloxy)maleimide. Photochemical Acid Generation in Solid-State and Application as Resist Materials

Ahn, Kwang-Duk, Chung, Chan-Moon, Koo, Deok-Il
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Volume:
6
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm00044a051
Date:
August, 1994
File:
PDF, 1.64 MB
english, 1994
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