Growth of Ultrathin Films of Amorphous Ruthenium−Phosphorus Alloys Using a Single Source CVD Precursor
Shin, Jinhong, Waheed, Abdul, Agapiou, Kyriacos, Winkenwerder, Wyatt A., Kim, Hyun-Wu, Jones, Richard A., Hwang, Gyeong S., Ekerdt, John G.Volume:
128
Language:
english
Journal:
Journal of the American Chemical Society
DOI:
10.1021/ja0673938
Date:
December, 2006
File:
PDF, 103 KB
english, 2006