The optical properties and applications of AlN thin films...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2002 Vol. 20; Iss. 3

The optical properties and applications of AlN thin films prepared by a helicon sputtering system

Chiu, W. Y., Wu, C. H., Kao, H. L., Jeng, Erik S., Chen, Jyh Shin, Jaing, C. C.
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Volume:
20
Year:
2002
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1470512
File:
PDF, 313 KB
english, 2002
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