Oxidation Resistance of Sputtered Ti[sub 1-x]Al[sub x]N...

Electrochemical and Solid-State Letters 2001 Vol. 4; Iss. 1

Oxidation Resistance of Sputtered Ti[sub 1-x]Al[sub x]N Films for Complementary Metal Oxide Semiconductor Storage Node Electrode Barriers

Kim, Sam-Dong, Hwang, In-Seok, Rhee, Jin-Koo, Cha, Tae-Ho, Kim, Heon-Do
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Volume:
4
Year:
2001
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.1344286
File:
PDF, 369 KB
english, 2001
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