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Versatile maskless microscope projection photolithography system and its application in light-directed fabrication of DNA microarrays
Naiser, Thomas, Mai, Timo, Michel, Wolfgang, Ott, AlbrechtVolume:
77
Year:
2006
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.2213152
File:
PDF, 1.09 MB
english, 2006