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Formation of silicon nanoislands on crystalline silicon substrates by thermal annealing of silicon rich oxide deposited by low pressure chemical vapour deposition
Yu, Zhenrui, Aceves-Mijares, Mariano, Luna-López, A, Du, Jinhui, Bian, DongcaiVolume:
17
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/17/19/031
Date:
October, 2006
File:
PDF, 945 KB
english, 2006