Strain- and pressure-dependent RF response of...

Journal of Micromechanics and Microengineering 2007 / 10 Vol. 17; Iss. 10

Strain- and pressure-dependent RF response of microelectromechanical resonators for sensing applications

Brueckner, K, Cimalla, V, Niebelschütz, F, Stephan, R, Tonisch, K, Ambacher, O, Hein, M A
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Volume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/10/013
Date:
October, 2007
File:
PDF, 403 KB
english, 2007
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