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Local interdiffusion at buried TiN/Si interfaces with scanning probes
Chen, C-H, Cheng, C-E, Hsu, C-C, Chang, M-N, Shiu, H W, Chien, F S-SVolume:
45
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/45/21/215307
Date:
May, 2012
File:
PDF, 1009 KB
english, 2012