Local interdiffusion at buried TiN/Si interfaces with...

Journal of Physics D Applied Physics 2012 / 05 Vol. 45; Iss. 21

Local interdiffusion at buried TiN/Si interfaces with scanning probes

Chen, C-H, Cheng, C-E, Hsu, C-C, Chang, M-N, Shiu, H W, Chien, F S-S
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Volume:
45
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/45/21/215307
Date:
May, 2012
File:
PDF, 1009 KB
english, 2012
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