Controlled Electrochemical Formation of Ge x Sb y Te z using Atomic Layer Deposition (ALD)
Liang, Xuehai, Jayaraju, Nagarajan, Thambidurai, Chandru, Zhang, Qinghui, Stickney, John L.Volume:
23
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm102672j
Date:
April, 2011
File:
PDF, 4.41 MB
english, 2011