Bias-Enhanced Nucleation and Growth Processes for Ultrananocrystalline Diamond Films in Ar/CH 4 Plasma and Their Enhanced Plasma Illumination Properties
Saravanan, Adhimoorthy, Huang, Bohr-Ran, Sankaran, Kamatchi Jothiramalingam, Kunuku, Srinivasu, Dong, Chung-Li, Leou, Keh-Chyang, Tai, Nyan-Hwa, Lin, I-NanVolume:
6
Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/am502231d
Date:
July, 2014
File:
PDF, 8.99 MB
english, 2014