Toward Environmentally Friendly Photolithographic...

Toward Environmentally Friendly Photolithographic Materials:  A New Class of Water-Soluble Photoresists

Yamada, Shintaro, Mrozek, Thomas, Rager, Timo, Owens, Jordan, Rangel, Jose, Willson, C. Grant, Byers, Jeffery
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
37
Language:
english
Journal:
Macromolecules
DOI:
10.1021/ma034461r
Date:
January, 2004
File:
PDF, 223 KB
english, 2004
Conversion to is in progress
Conversion to is failed