Improved Growth and Electrical Properties of...

Chemistry of Materials 2011 / 04 Vol. 23; Iss. 7

Improved Growth and Electrical Properties of Atomic-Layer-Deposited Metal-Oxide Film by Discrete Feeding Method of Metal Precursor

Park, Tae Joo, Kim, Jeong Hwan, Jang, Jae Hyuck, Kim, Un Ki, Lee, Sang Young, Lee, Joohwi, Jung, Hyung Suk, Hwang, Cheol Seong
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Volume:
23
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm100900k
Date:
April, 2011
File:
PDF, 3.59 MB
english, 2011
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