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Atomic Layer Deposition Growth of BaB 2 O 4 Thin Films from an Exceptionally Thermally Stable Tris(pyrazolyl)borate-Based Precursor
Saly, Mark J., Munnik, Frans, Baird, Ronald J., Winter, Charles H.Volume:
21
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm902030d
Date:
August, 2009
File:
PDF, 667 KB
english, 2009