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Fabrication of Anti-reflecting Si Nano-structures with Low Aspect Ratio by Nano-sphere Lithography Technique
Shenghua Sun,Peng Lu,Jun Xu,Ling Xu,Kunji Chen,Qimin Wang…Volume:
5
Language:
english
Journal:
Nano-Micro Letters
DOI:
10.1007/BF03353727
Date:
March, 2013
File:
PDF, 307 KB
english, 2013