An experimental study on semiconductor process chiller...

An experimental study on semiconductor process chiller using the digital scroll compressor

Dong An Cha,Oh Kyung Kwon,Myung Do Oh
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Volume:
28
Language:
english
Journal:
Journal of Mechanical Science and Technology
DOI:
10.1007/s12206-014-0745-7
Date:
August, 2014
File:
PDF, 1.53 MB
english, 2014
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