An experimental study on semiconductor process chiller using the digital scroll compressor
Dong An Cha,Oh Kyung Kwon,Myung Do OhVolume:
28
Language:
english
Journal:
Journal of Mechanical Science and Technology
DOI:
10.1007/s12206-014-0745-7
Date:
August, 2014
File:
PDF, 1.53 MB
english, 2014