Mechanical property evaluation of TSV-Cu micropillar by compression method
Ting Gu,Ping Cheng,Su Wang,Huiying Wang,Xuhan Dai…Volume:
10
Language:
english
Journal:
Electronic Materials Letters
DOI:
10.1007/s13391-014-3286-4
Date:
July, 2014
File:
PDF, 539 KB
english, 2014