Mechanistic Study of Surface Contamination of Dielectric...

Industrial & Engineering Chemistry Research 2004 / 06 Vol. 43; Iss. 12

Mechanistic Study of Surface Contamination of Dielectric Oxides Using Isotope Labeling

Raghu, Prashant, Yim, Chris, Iqbal, Asad, Shadman, Farhang, Shero, Eric, Verghese, Mohith
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Volume:
43
Language:
english
Journal:
Industrial & Engineering Chemistry Research
DOI:
10.1021/ie0305972
Date:
June, 2004
File:
PDF, 259 KB
english, 2004
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