Low-Dielectric, Nanoporous Organosilicate Films Prepared via Inorganic/Organic Polymer Hybrid Templates
Nguyen, Cattien V., Carter, Kenneth R., Hawker, Craig J., Hedrick, James L., Jaffe, Richard L., Miller, Robert D., Remenar, Julius F., Rhee, Hee-Woo, Rice, Philip M., Toney, Michael F., Trollsås, MikaVolume:
11
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm990114d
Date:
November, 1999
File:
PDF, 156 KB
english, 1999