Patterning by Etching at the Nanoscale (PENs) on Si(111)...

Chemistry of Materials 2007 / 05 Vol. 19; Iss. 11

Patterning by Etching at the Nanoscale (PENs) on Si(111) through the Controlled Etching of PDMS

Perring, Mathew, Mitchell, Michael, Kenis, Paul J. A., Bowden, Ned B.
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Volume:
19
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm062988n
Date:
May, 2007
File:
PDF, 449 KB
english, 2007
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