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Oxygen gettering in low-energy arsenic or antimony ion implanted Cz-silicon
Oberemok, O., Kladko, V., Litovchenko, V., Romanyuk, B., Popov, V., Melnik, V., Vanhellemont, J.Volume:
11
Language:
english
Journal:
physica status solidi (c)
DOI:
10.1002/pssc.201431562
Date:
November, 2014
File:
PDF, 908 KB
english, 2014