[IEEE 2010 IEEE Instrumentation & Measurement Technology Conference Proceedings - Austin, TX, USA (2010.05.3-2010.05.6)] 2010 IEEE Instrumentation & Measurement Technology Conference Proceedings - A low cost high sensitivity CMOS MEMS gas sensor
Pon, Yi-Joe, Shen, Chih-Hsiung, Chen, Shu-JungYear:
2010
Language:
english
DOI:
10.1109/IMTC.2010.5488078
File:
PDF, 1.02 MB
english, 2010