Photoresponsive polymers. 7. Reversible solubility change...

Photoresponsive polymers. 7. Reversible solubility change of polystyrene having pendant spirobenzopyran groups and its application to photoresists

Irie, Masahiro, Iwayanagi, Takao, Taniguchi, Yoshio
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Volume:
18
Language:
english
Journal:
Macromolecules
DOI:
10.1021/ma00154a014
Date:
December, 1985
File:
PDF, 634 KB
english, 1985
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