Multicycle rapid thermal annealing optimization of...

Journal of Applied Physics 2014 / 08 Vol. 116; Iss. 6

Multicycle rapid thermal annealing optimization of Mg-implanted GaN: Evolution of surface, optical, and structural properties

Greenlee, Jordan D., Feigelson, Boris N., Anderson, Travis J., Tadjer, Marko J., Hite, Jennifer K., Mastro, Michael A., Eddy, Charles R., Hobart, Karl D., Kub, Francis J.
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Volume:
116
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4892618
Date:
August, 2014
File:
PDF, 1.44 MB
english, 2014
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