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Theoretical Analysis of Strong-Axis Bending Mode Vibrations for Resonant Microcantilever (Bio)Chemical Sensors in Gas or Liquid Phase
Dufour, Isabelle, Heinrich, Stephen M., Josse, FabienVolume:
16
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2006.885850
Date:
February, 2007
File:
PDF, 472 KB
english, 2007