Modeling, Design, Fabrication, and Demonstration of a...

Journal of Microelectromechanical Systems 2009 Vol. 18; Iss. 6

Modeling, Design, Fabrication, and Demonstration of a Digital Micromirror With Interdigitated Cantilevers

. Dae-hyun Kim, . Min-wu Kim, . Jin-wan Jeon, . Koeng Su Lim, . Jun-bo Yoon
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Volume:
18
Year:
2009
Language:
english
DOI:
10.1109/JMEMS.2009.2031696
File:
PDF, 2.53 MB
english, 2009
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