New Inductive rf Discharge Using an Internal Metal Antenna

Japanese Journal of Applied Physics 1995 / 12 Vol. 34; Iss. Part 2, No

New Inductive rf Discharge Using an Internal Metal Antenna

Nakamura, Keiji, Kuwashita, Yukiyasu, Sugai, Hideo
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Volume:
34
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.34.L1686
Date:
December, 1995
File:
PDF, 598 KB
1995
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