CMOS-Integrated Si/SiGe Quantum-Well Infrared...

IEEE Journal of Selected Topics in Quantum Electronics 2015 / 7 Vol. 21; Iss. 4

CMOS-Integrated Si/SiGe Quantum-Well Infrared Microbolometer Focal Plane Arrays Manufactured With Very Large-Scale Heterogeneous 3-D Integration

Forsberg, Fredrik, Lapadatu, Adriana, Kittilsland, Gjermund, Martinsen, Stian, Roxhed, Niclas, Fischer, Andreas C., Stemme, Goran, Samel, Bjorn, Ericsson, Per, Hoivik, Nils, Bakke, Thor, Bring, Martin
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Volume:
21
Language:
english
Journal:
IEEE Journal of Selected Topics in Quantum Electronics
DOI:
10.1109/JSTQE.2014.2358198
Date:
July, 2015
File:
PDF, 8.05 MB
english, 2015
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