[IEEE 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Shenzhen, China (2009.01.5-2009.01.8)] 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Characterization of line edge roughness and line width roughness of nano-scale typical structures
Jiang, Zhuangde, Zhao, Fengxia, Jing, Weixuan, Prewett, Philip D., Jiang, KyleYear:
2009
Language:
english
DOI:
10.1109/NEMS.2009.5068582
File:
PDF, 3.84 MB
english, 2009