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Aluminum oxide mask fabrication by focused ion beam implantation combined with wet etching
Liu, Zhengjun, Iltanen, Kari, Chekurov, Nikolai, Grigoras, Kestutis, Tittonen, IlkkaVolume:
24
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/24/17/175304
Date:
May, 2013
File:
PDF, 844 KB
english, 2013