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Ultra-thin SiNx in superlattice via nitridation of a-Si in-situ hot wire chemical vapor deposition
Rai, Dharmendra Kumar, Solanki, Chetan Singh, Balasubramaniam, K.R.Volume:
565
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2014.07.003
Date:
August, 2014
File:
PDF, 899 KB
english, 2014