NANOMIXED TiO 2 -Ga...

NANOMIXED TiO 2 -Ga 2 O 3 THIN FILMS GROWN BY PLASMA ENHANCED ATOMIC LAYER DEPOSITION (PEALD) METHOD

LIU, G. X., SHAN, F. K., LEE, W. J., LEE, G. H., KIM, I. S., SHIN, B. C.
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Volume:
85
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580601085834
Date:
November, 2006
File:
PDF, 747 KB
english, 2006
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