![](/img/cover-not-exists.png)
NANOMIXED TiO 2 -Ga 2 O 3 THIN FILMS GROWN BY PLASMA ENHANCED ATOMIC LAYER DEPOSITION (PEALD) METHOD
LIU, G. X., SHAN, F. K., LEE, W. J., LEE, G. H., KIM, I. S., SHIN, B. C.Volume:
85
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580601085834
Date:
November, 2006
File:
PDF, 747 KB
english, 2006