[IEEE 19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey (22-26 Jan. 2006)] 19th IEEE International Conference on Micro Electro Mechanical Systems - 3D Lithography and Deposition on Highly Structured Surfaces Using Plasma Surface Modification, SAM Coating, and Contact Displacement Electroless Plating
Wang-Shen Su,, Sheng-Ta Lee,, Ming-Shih Tsai,, Weileun Fang,Year:
2006
Language:
english
DOI:
10.1109/MEMSYS.2006.1627789
File:
PDF, 1.11 MB
english, 2006