Etch assisted ultrasonic floating abrasion process, a new concept for material removal
Aref Arjmand, Abolfazl, Khalaj Amineh, Sasan, Salimijazi, Hamidreza, Fadaei Tehrani, AlirezaVolume:
129
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2014.06.023
Date:
November, 2014
File:
PDF, 1.56 MB
english, 2014