Dense high aspect ratio hydrogen silsesquioxane...

Dense high aspect ratio hydrogen silsesquioxane nanostructures by 100 keV electron beam lithography

Vila-Comamala, Joan, Gorelick, Sergey, Guzenko, Vitaliy A, Färm, Elina, Ritala, Mikko, David, Christian
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Volume:
21
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/21/28/285305
Date:
July, 2010
File:
PDF, 1.22 MB
english, 2010
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