Dense high aspect ratio hydrogen silsesquioxane nanostructures by 100 keV electron beam lithography
Vila-Comamala, Joan, Gorelick, Sergey, Guzenko, Vitaliy A, Färm, Elina, Ritala, Mikko, David, ChristianVolume:
21
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/21/28/285305
Date:
July, 2010
File:
PDF, 1.22 MB
english, 2010