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High-throughput anisotropic plasma etching of polyimide for MEMS
Bliznetsov, Vladimir, Manickam, Anbumalar, Chen, Junwei, Ranganathan, NagarajanVolume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/6/067003
Date:
June, 2011
File:
PDF, 522 KB
english, 2011