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(Ba,Sr)TiO 3 (BST) capacitor fabrication using electrochemical deposition (ecd) platinum process
Choi, Hyung Bok, Hong, Kwon, Song, Chang Rock, Roh, Jae Sung, Yoon, Hee KooVolume:
37
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580108015659
Date:
January, 2001
File:
PDF, 736 KB
english, 2001