High reliable lead-zirconate-titanate growth using reactive sputtering and rapid thermal annealing
Yamauchi, Satoshi, Yoshimaru, MasakiVolume:
14
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584589708019988
Date:
January, 1997
File:
PDF, 679 KB
english, 1997