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High Resolution Optical Surface Investigation based on Heterodyne Interferometry
Spannagel, Ruven, Schuldt, Thilo, Braxmaier, ClausVolume:
6
Language:
english
Pages:
11
Journal:
International Journal of Optomechatronics
DOI:
10.1080/15599612.2012.709312
Date:
July, 2012
File:
PDF, 910 KB
english, 2012