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Contributions of CF and CF 2 Species to Fluorocarbon Film Composition and Properties for C x F y Plasma-Enhanced Chemical Vapor Deposition
Cuddy, Michael F., Fisher, Ellen R.Volume:
4
Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/am2018546
Date:
March, 2012
File:
PDF, 2.48 MB
english, 2012