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Shear mode coupling and tilted grain growth of AlN thin films in BAW resonators
F. Martin, M. Jan, S. Rey-mermet, B. Belgacem, D. Su, M. Cantoni, P. MuraltVolume:
53
Year:
2006
Language:
english
DOI:
10.1109/TUFFC.2006.1665082
File:
PDF, 418 KB
english, 2006