Characterization of carbon nitride films prepared by laser reactive ablation deposition
J. Zemek, A. Luches, G. Leggieri, A. Fejfar, M. TrchováVolume:
76
Year:
1995
Language:
english
Pages:
6
DOI:
10.1016/0368-2048(95)02398-4
File:
PDF, 380 KB
english, 1995