Synchrotron radiation etching of diamond surfaces in the...

Synchrotron radiation etching of diamond surfaces in the low pressure atmosphere of O2 and SF6

Eiji Ishiguro, Haruhiko Ohashi, Tomohiko Sasano, Kosuke Shobatake
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Volume:
80
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/0368-2048(96)02926-x
File:
PDF, 273 KB
english, 1996
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