New On-Chip Nanomechanical Testing Laboratory - Applications to Aluminum and Polysilicon Thin Films
S. Gravier, M. Coulombier, A. Safi, N. Andre, A. Boe, J. Raskin, T. PardoenVolume:
18
Year:
2009
Language:
english
DOI:
10.1109/JMEMS.2009.2020380
File:
PDF, 1.12 MB
english, 2009