[IEEE IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004. - San Francisco, CA, USA (Dec. 13-15, 2004)] IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004. - Implant damage and gate-oxide-edge effects on product reliability
Yung-Huei Lee,, Nachman, R., Hu, S., Mielke, N., Liu, J.Year:
2004
Language:
english
DOI:
10.1109/IEDM.2004.1419194
File:
PDF, 295 KB
english, 2004