[IEEE 2000 International Conference on Simulation of Semiconductor Processes and Devices - Seattle, WA, USA (6-8 Sept. 2000)] 2000 International Conference on Simulation Semiconductor Processes and Devices (Cat. No.00TH8502) - Prediction of SiO/sub 2/ sputtering yield using molecular dynamics simulation
Kyusang Lee,, Tai-Kyung Kim,Year:
2000
Language:
english
DOI:
10.1109/SISPAD.2000.871246
File:
PDF, 280 KB
english, 2000