[IEEE 2010 IEEE Ultrasonics Symposium (IUS) - San Diego, CA, USA (2010.10.11-2010.10.14)] 2010 IEEE International Ultrasonics Symposium - Fabrication of high-Q film bulk acoustic resonator (FBAR) filters with carbon nanotube (CNT) electrodes
Garcia-Gancedo, L., Al-Naimi, F., Flewitt, A. J., Milne, W. I., Ashley, G. M., Luo, J. K., Zhao, X. B., Lu, J. R.Year:
2010
Language:
english
DOI:
10.1109/ULTSYM.2010.5935514
File:
PDF, 938 KB
english, 2010