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Effects of carbon on phosphorus diffusion in SiGe:C and the implications on phosphorus diffusion mechanisms
Lin, Yiheng, Yasuda, Hiroshi, Schiekofer, Manfred, Benna, Bernhard, Wise, Rick, Xia, Guangrui (Maggie)Volume:
116
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4897498
Date:
October, 2014
File:
PDF, 2.99 MB
english, 2014