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[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Controlled Silicon (001) Surface Periodic Nanopatterning by Direct Wafer Bonding
Bavard, Alexis, Mézière, Jéro^me, Fournel, Frank, Pascale, Alina, Gentile, Pascal, Eymery, JoelVolume:
3
Year:
2006
Language:
english
DOI:
10.1149/1.2357076
File:
PDF, 1.25 MB
english, 2006