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[IEEE 2010 IEEE 10th Conference on Nanotechnology (IEEE-NANO) - Ilsan, Gyeonggi-Do, Korea (South) (2010.08.17-2010.08.20)] 10th IEEE International Conference on Nanotechnology - Effect of redeposition — An important consideration in existing mathematical model of sputtering process in focused ion beam milling
Bhavsar, Sanket N., Aravindan, Sivanandam, Venkateswara Rao, P.Year:
2010
DOI:
10.1109/NANO.2010.5697818
File:
PDF, 98 KB
2010