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[IEEE Comput. Soc International Conference on MEMS, NANO and Smart Systems - Banff, Alta., Canada (20-23 July 2003)] Proceedings International Conference on MEMS, NANO and Smart Systems - Finite element simulation and theoretical analysis of microelectromechanical system relays
Li Desheng,, Zhang Yufeng,Year:
2003
Language:
english
DOI:
10.1109/ICMENS.2003.1222012
File:
PDF, 281 KB
english, 2003